“Nanopositioning machines need a fast visualization and a modern control” by Braunschweig and Weiss
Conference:
Type:
Entry Number: 106
Title:
- Nanopositioning machines need a fast visualization and a modern control
Presenter(s)/Author(s):
Abstract:
Nanopositioning and nanomeasuring machines (NPM) serve for the positioning, measurement and treatment of objects with nanometer precision. Fields of application are, e.g., microelectronics, micromechanics, molecular biology and genetic engineering. In a Sonderforschungsbereich (special research project) at the Technische Universität Ilmenau (TUI) under the guidance of Prof. Jäger the scientific-technical basics for the design and for the implementation of NPM shall be developed. Fig. 1 shows a NPM, developed at the TUI, that possesses the following parameters: positioning range: 25 mm x 25 mm x 5mm resolution: 1,24 nm positioning uncertainty: < 10nm
Since resolutions in nanometer range cannot be perceived by the human eye, NPM require an efficient, fast 3D visualization, e.g., to the operator’s guidance. Moreover it must be possible to show the measurement results while measuring or treatment. Measuring and treatments in the field of nanometer require constant climatic conditions, so that only the real time components of the control may exist directly at the NPM. The proper user interface must or can be installed in another room, in another building or even for test and diagnosis purposes in another country somewhere in the world. A requirement for such remote controls is an efficient, fast visualization.
